Scanning exposure apparatus and device manufacturing method usin

Photocopying – Projection printing and copying cameras – Illumination systems or details

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Details

355 53, G03B 2742, G03B 2774

Patent

active

056443838

ABSTRACT:
A scanning exposure apparatus includes a supplying system for supplying exposure light to a substrate to be scanned in a direction. The exposure light has a predetermined intensity distribution in the direction of scan, a detecting device for detecting the light quantity of the exposure light, and a control system for controlling the supplying system on the basis of the light quantity and the predetermined intensity distribution of the exposure light.

REFERENCES:
patent: 4370026 (1983-01-01), Dubroeucq et al.
patent: 4711568 (1987-12-01), Torigoe et al.
patent: 4822975 (1989-04-01), Torigoe
patent: 4851978 (1989-07-01), Ichihara
patent: 4884101 (1989-11-01), Tanimoto
patent: 4947047 (1990-08-01), Muraki
patent: 4970546 (1990-11-01), Suzuki et al.
patent: 4974919 (1990-12-01), Muraki et al.
patent: 5053614 (1991-10-01), Yui et al.
patent: 5097291 (1992-03-01), Suzuki
patent: 5107275 (1992-04-01), Tsuruoka et al.
patent: 5119390 (1992-06-01), Ohmori
patent: 5171965 (1992-12-01), Suzuki et al.
patent: 5191374 (1993-03-01), Hazama et al.
patent: 5250797 (1993-10-01), Sano et al.
patent: 5343270 (1994-08-01), Sakakibara et al.
patent: 5473412 (1995-12-01), Ozawa

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