Process for making high performance CMOS and bipolar integrated

Details Process for making high performance CMOS and bipolar integrated Process for making high performance CMOS and bipolar integrated

1987-10-23

1988-08-16

Roy, Upendra

Fishing, trapping, and vermin destroying

357 42, 357 91, 437 56, 437 69, 437162, H01L 2122, H01L 21225

Patent

active

047644800

ABSTRACT:
There is disclosed a high performance MOS transistor structure of either the N channel or P channel variety and a high performance bipolar transistor structure. A process is disclosed which can make high performance CMOS and high performance bipolar devices on the same die.

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