Method of making photoelectric conversion device

Details Method of making photoelectric conversion device Method of making photoelectric conversion device

1987-05-19

1988-08-16

Weisstuch, Aaron

Fishing, trapping, and vermin destroying

437 51, 437174, 437205, 437233, 437247, 136244, 136258, 148DIG90, 148DIG93, H01L 3104

Patent

active

047644761

ABSTRACT:
A method of making a photoelectric conversion device with a substrate having an insulating surface, and a plurality n of non-single crystal semiconductor photoelectric conversion elements U.sub.1 to U.sub.n sequentially formed side by side on the substrate and connected in series one after another, which eliminates leakage between electrodes and attains a high photoelectric conversion efficiency. The active portion of each element U.sub.1 to U.sub.n is selectively annealed by light irradiation to increase its crystallinity, hence conductivity. The intercell coupling portion has a high resistance to current leakage.

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