Method of forming an improved gate dielectric for a MOSFET on an

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156643, 156662, 156668, 156657, 148DIG150, 148DIG81, 148DIG118, 427255, 437 83, 437 84, 437 82, 437109, 437914, 437973, 357 237, 357 59, H01L 21473

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047585293

ABSTRACT:
A method for forming a silicon dioxide layer on a silicon island on an insulating substrate includes the steps of initially providing an insulating substrate having a major surface on which a silicon island is disposed. The surface of the silicon island is then thermally oxidized and a silicon layer is deposited on the oxidized island and the portion of the substrate surface adjacent to the island. This entire silicon layer is then oxidized and a conductive polycrystalline silicon electrode is deposited thereon.

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