Original feeding apparatus and a cassette for containing the ori

Material or article handling – Device for emptying portable receptacle – With container opening means

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Details

206328, 414416, 414786, B65D 8530, G03B 902, G03B 4116

Patent

active

047581271

ABSTRACT:
An apparatus includes a plurality of cassettes each for containing a mask or reticle having thereon an integrated circuit pattern, each cassette having a holder for holding the mask or reticle while covering the lower surface thereof, the apparatus further including a carrier for storing therein the cassettes in a layered fashion, a fork for selectively taking out one of the holders from the carrier and an elevator for feeding the take-out holder to a separation station so that the mask or reticle is automatically taken out from, fed from and moved back into the carrier.

REFERENCES:
patent: 3044198 (1962-07-01), Badalich
patent: 3112032 (1963-11-01), Riecke
patent: 3615006 (1971-10-01), Freed
patent: 4049142 (1977-09-01), Azzaroni
patent: 4126224 (1978-11-01), Laauwe et al.
patent: 4363403 (1982-12-01), Raucci, Jr. et al.
patent: 4428480 (1984-01-01), Ackeret
patent: 4480423 (1984-11-01), Muller
patent: 4549843 (1985-10-01), Jagusch et al.
Semiconductor Production, "New Automatic Wafer Handling Equipment", Autumn, 1980, pp. 31, 33.

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