Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Patent
1997-12-12
2000-08-22
Grant, William
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
700 95, 700 99, 700121, G06F 1900, G06F 1700
Patent
active
061085855
ABSTRACT:
A probabilistic dispatching method and arrangement for directing the movement of wafers in a manufacturing process. In a manufacturing process, some process steps may be performed by tools at alternate locations. Delivery of the material from one manufacturing process step to the next occurs via a rail for transporting the material and stockers for holding the material until the processing can commence. While awaiting processing, material may be moved from one stocker to a stocker at an alternate location and then removed for processing. A distribution of removal events is maintained for process steps having alternate locations, wherein a removal event refers to removal of material from a stocker for processing. When material is returned to a stocker for delivery to another stocker to await a subsequent processing step, the other stocker is identified as a function of the distribution of removal events for the subsequent processing step.
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Conboy Michael R.
Ryan Patrick J.
Advanced Micro Devices , Inc.
Cabrera Zoila
Grant William
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