Positive radiation sensitive resist terpolymer from omega alkyno

Details Positive radiation sensitive resist terpolymer from omega alkyno Positive radiation sensitive resist terpolymer from omega alkyno

1982-07-09

1983-09-20

Anderson, Harold D.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

From carboxylic acid or derivative thereof

528271, C08G 7522

Patent

active

044057768

ABSTRACT:
This invention relates to novel terpolymers of 3-methylcyclopentene, an omega alkynoic acid and sulfur dioxide. Positive radiation sensitive films prepared from the subject terpolymers adhere well to the substrate, demonstrate resistance to cracking and erosion during development and possess excellent edge definition.

REFERENCES:
patent: 3898350 (1975-08-01), Gipstein et al.
patent: 3935331 (1976-01-01), Poliniak et al.
patent: 3935332 (1976-01-01), Poliniak et al.
patent: 4153741 (1979-05-01), Poliniak et al.
patent: 4262073 (1981-04-01), Pampalone et al.
Hatzakis et al., J. Electrochem. Soc., Jan., 1979, pp. 154-161.

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