Protective optical coating and method for use thereof

Details Protective optical coating and method for use thereof Protective optical coating and method for use thereof

1987-05-04

1989-05-02

Carroll, J.

357 51, H01L 2702, H01L 2934

Patent

active

048273252

ABSTRACT:
A multilayer optical coating for semiconductor substrates characterized in that it is etchable by conventional techniques used for fabrication of integrated circuits and has high reflectivity.

REFERENCES:
patent: 3740523 (1973-06-01), Cohen et al.
patent: 4238839 (1980-12-01), Redfern et al.
patent: 4387503 (1987-06-01), Aswell et al.
patent: 4692786 (1987-09-01), Lidenfelser
J. C. North et al., "Laser Coding of Bipolar Read-Only Memories", IEEE Journal of Solid-State Circuits, vol. SC-11, No. 4 (Aug. 1976) pp. 500-505.
Smart, D. "Optimization of Semiconductor Layer Thickness for Repair of RAMs", application report 150, Teradyne Inc., Boston, MA.
North, J. C., "Laser Vaporization of Metal Films-Effect of Optical Interference in Underlying Dielectric Layers", Journal of Applied Physics, vol. 48, No. 6 (Jun. 1977) pp. 2419-2423.

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