Subresolution element spatial measurement technique

Details Subresolution element spatial measurement technique Subresolution element spatial measurement technique

1987-10-26

1989-05-02

Westin, Edward P.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250561, 356386, G01B 1104

Patent

active

048271411

ABSTRACT:
An inspection system incorporating a subresolution element spatial measurement technique is disclosed. The system of the invention includes a scanner for scanning, with a beam of electromagnetic energy, an object area having first and second contiguous sections of first and second degrees of reflectivity or transmissivity with respect to the beam. A detector assembly is disposed to receive energy reflected from or transmitted through the object area and to provide a first signal having a first measured value S representing the amplitude of energy instantaneously reflected from or transmitted through the object area. Processing apparatus is included for analyzing the first signal and computing the ratio F of one of the first or second sections as a fraction of the total area instantaneously illuminated by the beam.

REFERENCES:
patent: 3710128 (1973-01-01), Kubisiak
patent: 3782834 (1974-01-01), Fujimori et al.
patent: 4142105 (1979-02-01), Erdmann
patent: 4697088 (1987-09-01), Bishop

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