Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1988-12-13
1989-11-28
Budd, Mark O.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
310313R, 333195, 357 26, 29 2535, H01L 4108
Patent
active
048840017
ABSTRACT:
A novel heterojunction acoustic charge transport device (HACT) includes a modulation doped field effect transistor (MODFET) on the same substrate. The device is characterized by a sequence of epitaxial layers such that the MODFET is fabricated in a first portion of the uppermost layers while the HACT device is fabricated in an adjacent second portion using a partially overlapping subset of the lower layers after selected upper ones have been removed to form a single integrated electro-acoustic device.
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Sacks Robert N.
Tanski William J.
Budd Mark O.
United Technologies Corporation
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