Monolithic electro-acoustic device having an acoustic charge tra

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

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310313R, 333195, 357 26, 29 2535, H01L 4108

Patent

active

048840017

ABSTRACT:
A novel heterojunction acoustic charge transport device (HACT) includes a modulation doped field effect transistor (MODFET) on the same substrate. The device is characterized by a sequence of epitaxial layers such that the MODFET is fabricated in a first portion of the uppermost layers while the HACT device is fabricated in an adjacent second portion using a partially overlapping subset of the lower layers after selected upper ones have been removed to form a single integrated electro-acoustic device.

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