Error correcting method for measuring object surface using three

Details Error correcting method for measuring object surface using three Error correcting method for measuring object surface using three

1992-02-04

1994-02-01

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

With light attenuation

356349, 356360, 356371, 33502, 33503, 33505, 33547, G01B 1104

Patent

active

052836304

ABSTRACT:
A three-dimension measuring apparatus having a probe, such as non-contact optical probe, is used to measure the surface of an object, such as an aspherical lens. Initially, the apparatus is used to obtain reference probe measured values of a reference spherical surface having a concave surface and a convex surface. The thus obtained reference probe measure values are compared with data denoting an ideal spherical surface to determine measurement errors corresponding to inclinations of the surface of an object to be measured. Then, the apparatus is used to measure the object to obtain respective probe measured values. The previously determined measurement errors are subtracted from the measured values of corresponding inclinations, thereby compensating for the measurement errors during measurement of the object surface.

REFERENCES:
patent: 4682894 (1987-07-01), Schmidt et al.
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patent: 4982504 (1991-01-01), Soderberg et al.
patent: 5106183 (1992-04-01), Yoder, Jr.
"Calibration Methods for Measurement Accuracy of the Ultrahigh Accurate 3-D Profilometer", Keiichi Yoshizume, Kadoma, Japan, pp. 687(57)-695(65).
"Ultrahigh Accuracy 3-D Profilometer", Keiichi Yoshizumi et al., Applied Optics, vol. 26, No. 9, May 1, 1987, pp. 1647-1653.

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