In-line non-contact wafer boat inspection apparatus

Details In-line non-contact wafer boat inspection apparatus In-line non-contact wafer boat inspection apparatus

1992-11-30

1994-03-01

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250237G, G01N 2186, H01J 314

Patent

active

052910253

ABSTRACT:
An apparatus is disclosed for automatic optical inspection of a wafer boat having a plurality of parallel slotted side rods and bottom rods. A cradle holds the wafer boat in a stationary position. A separate optical sensor is mounted upon a carriage for each of the rods to be measured. Each of these sensors projects an optical beam toward the corresponding rod where, when longitudinally aligned within an individual slot, the beam is parallel to and substantially near the bottom of the slot. As the carriage is scanned from one end of the rods of the wafer boat to the other, the optical beam will be alternately obstructed by the rod or transmitted through a slot, thereby determining the slot edge locations of each of the slots in each of the rods in accordance with the position of the carriage. The slot widths and slot locations can then be determined from the slot edge locations. Additionally, the length of each of the bottom rods can be measured by reflecting an optical beam off of a flat surface of a clamp block positioned against the end of each of the bottom rods.

REFERENCES:
patent: 4568234 (1986-02-01), Lee et al.
patent: 4572101 (1986-02-01), Lee
patent: 5153841 (1982-10-01), Goff et al.
Specification sheet for Series 3000 Non-Contact Measurement Systems, Pacific Precision Laboratories, Inc., Chatsworth, California, four (4) pages.
Brochure for Quartz Carriers, MGI Systems, A division of Micro Glass, Inc., eight (8) pages.

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