Method for manufacturing a semiconductor device on a substrate h

Details Method for manufacturing a semiconductor device on a substrate h Method for manufacturing a semiconductor device on a substrate h

1992-03-17

1994-02-01

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437101, 437924, 148DIG102, H01R 2122

Patent

active

052832058

ABSTRACT:
A method for manufacturing a semiconductor device which allows to form a semiconductor device on an insulating amorphous material or an insulating crystallized glass in high precision alignment is provided.
The present invention is characterized in that alignment markers of masks are formed along a direction in which a degree of expansion-contraction of a substrate is smaller when the semiconductor device is fabricated by laminating thin films having patterns on the substrate.

REFERENCES:
patent: 4256829 (1981-03-01), Daniel
patent: 4936930 (1990-06-01), Gruber et al.

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