Device for enriching a carrier gas with the vapor of a sparingly

Agitating – By injecting gas into mixing chamber

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366144, 366341, 406 87, 406 92, 222630, B01F 1302

Patent

active

048833622

ABSTRACT:
An enriching device consisting of a container which comprises a removable tightly fitting metal body the sparingly volatile material being present in a coiled groove. During operation of this device transverse flows and shortcuts, respectively, of the carrier gas flow occur. To assure that the carrier gas flows through the material without having an escape possibility, the groove (5) is made either in an outer wall of the metal body (8) or in the bottom (4) of the container (1), and the parts (6) present between the individual turns of the groove have a cutting edge, i.e. a cross-sectional profile in the form of a wedge, the tip of which is in contact either with the smooth inner wall of the container (1) or with the smooth lower side of the metal body (8). The device is suitable for adjusting a defined mass flow of sparingly volatile materials which are used as starting compounds for chemical deposition from the gaseous phase.

REFERENCES:
patent: 2878972 (1959-03-01), Matthews
patent: 3312507 (1967-04-01), Oehlrich et al.
patent: 3618828 (1971-11-01), Schinella
patent: 4345841 (1982-08-01), Day

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