Alignment of a shadow frame and large flat substrates on a suppo

Details Alignment of a shadow frame and large flat substrates on a suppo Alignment of a shadow frame and large flat substrates on a suppo

1993-01-28

1994-10-04

Bueker, Richard

Coating apparatus

Gas or vapor deposition

With treating means

118728, 118729, 156345, 269 56, 20429815, 4272481, 4272555, C23C 1600

Patent

active

053522940

ABSTRACT:
Centering pins mounted to a susceptor in a vacuum chamber align a glass substrate with respect to the susceptor on which it is supported, and with respect to a shadow frame which overlies the periphery of the substrate and protects the edge and underside of the substrate from undesired processing.
Shaped pins loosely mounted in openings in the susceptor so that the pins extend above the upper surface of the susceptor support the centered glass substrate during the transporting stages, but recess into the susceptor during processing.

REFERENCES:
patent: 4842683 (1988-04-01), Cheng et al.
patent: 4990047 (1989-05-01), Wagner et al.
patent: 5037262 (1989-07-01), Moll et al.
patent: 5090900 (1990-09-01), Rudolf et al.

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