Process for making oxide superconducting films by pulsed excimer

Details Process for making oxide superconducting films by pulsed excimer Process for making oxide superconducting films by pulsed excimer

1992-10-19

1994-03-01

King, Roy

Superconductor technology: apparatus, material, process

High temperature , per se

Having tc greater than or equal to 150 k

505732, 505730, 427596, 4271263, 427 62, B05D 306, B05D 512

Patent

active

052907619

ABSTRACT:
A process for producing thin films of superconducting material by bombarding a heated target with radiation from pulsed high energy UV laser to form a plume of target material, and depositing the plume on a substrate is disclosed.

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Hughes, R. et al., Appl. Phys. Lett. 58 (7) pp. 762-764, Feb. 18, 1991.
Singh, R. et al., Appl. Phys. Lett. 55 (22), pp. 2351-2353, Nov. 27, 1989.
Znotins, T. A., Solid State Tech. pp. 99-104, Sep. 1986.

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