Coatings for microelectronic devices and substrates

Details Coatings for microelectronic devices and substrates Coatings for microelectronic devices and substrates

1990-08-07

1994-03-01

Bell, Mark L.

Compositions: coating or plastic

Materials or ingredients

Pigment, filler, or aggregate compositions, e.g., stone,...

106490, 427 58, 4274191, 4274192, 4274197, 4274198, 524284, 524356, 524377, 524404, 524405, 524408, 524490, 524484, C08K 554

Patent

active

052903540

ABSTRACT:
The present invention relates to a method of forming a ceramic or ceramic-like coating on a substrate, especially electronic devices, as well as the substrate coated thereby. The method comprises coating said substrate with a solution comprising a solvent, hydrogen silsesquioxane resin and a modifying ceramic oxide precursor selected from the group consisting of tantalum oxide precursors, niobium oxide precursors, vanadium oxide precursors, phosphorous oxide precursors and boron oxide precursors. The solvent is then evaporated to thereby deposit a preceramic coating on the substrate. The preceramic coating is then ceramified by heating the to a temperature of between about 40.degree. C. and about 1000.degree. C. This coating, moreover, may be covered by additional passivation and barrier coatings.

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patent: 4885186 (1989-12-01), Bagley et al.
patent: 4929575 (1990-05-01), Khoury et al.
patent: 4970097 (1990-11-01), Kalinowski

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