Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive
Patent
1996-09-13
1998-05-05
Tokar, Michael J.
Radiant energy
Invisible radiant energy responsive electric signalling
Infrared responsive
G01J 500
Patent
active
057478040
ABSTRACT:
Apparatus (102, 202, 302) and method for tunneling rate infrared detection devices formed on a single substrate (100). A counter electrode (104, 207) having a plurality of portions extending from the substrate (100) with the counter electrode (104, 207) suspended above the substrate (100) at a distance from a tunneling electrode (116) so that a tunneling current flows through the counter electrode (104, 207) and tunneling electrode (116) in response to an applied bias voltage. The counter electrode (104, 207) and tunneling electrodes (116) form a circuit that produces an output signal. A force applied to the sensor (102, 202, 302) urges the counter electrode (104, 207, 304) to deflect relative to the tunneling electrode (116) to modulate the output signal. The output signal is a control voltage that is applied between the counter electrode (104, 207, 304) and a control electrode (114) to maintain a constant tunneling current. In the preferred embodiment, two cantilever portions (108, 110) extend from the wafer surface (100). In a further embodiment, three portions (206, 208, 210) extend from the substrate (100). In an alternate embodiment, a counter electrode (304) having a varying width is fabricated.
REFERENCES:
patent: 5265470 (1993-11-01), Kaiser et al.
patent: 5436452 (1995-07-01), Kenny et al.
Barnes et al. "Photothermal Spectroscopy with Femtojoule Sensitivity Using a Micromechanical Device", Nature 372, Nov. 1994, pp. 79-81.
Norton Paul R.
Williams Ronald L.
Hanig Richard
Lenzen, Jr. G. H.
Raytheon Company
Schubert W. C.
Tokar Michael J.
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