Fluid treatment apparatus and method

Details Fluid treatment apparatus and method Fluid treatment apparatus and method

1992-07-10

1994-03-01

Bennet, Henry A.

Drying and gas or vapor contact with solids

Apparatus

With means to treat gas or vapor

134 64R, 15302, 118 63, 34160, F26B 700

Patent

active

052896390

ABSTRACT:
A new apparatus for treating substrates with fluids, as well as a corresponding fluid treatment method, is disclosed. The new apparatus includes a new configuration of fluid jet injectors which substantially overcomes the problem of dragout, in which fluid impinged upon an area of a substrate is retained on that area, preventing fresh fluid from reaching the impinged area. This new configuration also avoids imposing torques on substrates, and substantially reduces the need for rollers and guides for transporting substrates.

REFERENCES:
patent: 3734109 (1973-05-01), Hebner
patent: 4137988 (1979-02-01), Croix-Marie
patent: 4174261 (1979-11-01), Pellegrino
patent: 4202073 (1980-05-01), Hughes
patent: 4270317 (1981-06-01), Kurie
patent: 4557785 (1985-12-01), Ohkuma
patent: 4789405 (1988-12-01), Blasing et al.
patent: 4854004 (1989-08-01), Omata et al.
patent: 5063951 (1991-11-01), Bard et al.

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