Optical grating sensor and method of monitoring with a multi-per

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system

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25022723, 25023114, 250226, H01J 314

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049856243

ABSTRACT:
The sensor and method of monitoring of the invention uses light diffracted from diffracting elements having at least one region of nonuniformity. The sensor is useful for monitoring displacement, stress, temperature and pressure. In one form of the invention, a diffraction grating is fabricated from first and second gratings and has a step-wise change in the grating period at an inter-grating boundary. The grating is illuminated with broadband light that is diffracted as a function of the irradiated position on the grating with the wavelength of the diffracted light and the change in wavelength being a function of the diffraction grating position. In another form of the present invention, a diffraction grating is provided with a variable grating period that can very linearly, exponentially, or in accordance with some other function with the wavelength of the diffracted light being a function of the relative displacement of the grating. Additionally, gratings can be combined to provide a transducer that provides an output that can be compensated for temperature variations.

REFERENCES:
patent: 3794408 (1974-02-01), Ian et al.
patent: 4528448 (1985-07-01), Doggett
patent: 4677293 (1987-06-01), Michel
patent: 4806034 (1989-02-01), Plummer
patent: 4874941 (1989-10-01), Spillman

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