Patent
1981-12-02
1983-04-05
Arnold, Bruce Y.
350 11, G02B 2714
Patent
active
043789536
ABSTRACT:
Edge-supported and fully supported membranes having substantially uniform thickness, and substantially parallel surfaces, and having the capacity to transmit at least about 90% of incident light with very little diffraction, dispersion or absorption of incident light are made by forming a polymer/solvent mixture, spin-coating a film of the polymer from the mixture onto a rotatable surface, which may have a release agent thereon, and, where a release agent is present, joining a frame or other support to the membrane and removing the membrane with its attached support from the surface. Apparatus for making such membranes includes a dispenser for dispensing a polymer/solvent mixture onto a rotatable support; a device for spinning the rotatable support at gradually increasing speeds from a first to a second speed; and a device for maintaining the speed of rotation of the support at the second speed until the membrane forms.
REFERENCES:
patent: 2907672 (1969-10-01), Irland et al.
patent: 3438694 (1969-04-01), Reid et al.
patent: 3811753 (1974-05-01), Onoki et al.
National Photocolor Corp., "NPC Pellicle Coatings and Curves", NPC, 53 Water St., South Norwalk Conn 06854, dated 3/3/1970.
Union Carbide, "Parylene Pellicles", Union Carbide Corp., New Business Development Dept., 270 Park Ave., N.Y., N.Y., 10017 dated Aug. 1971.
Advanced Semiconductor Products
Arnold Bruce Y.
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