Process and apparatus for obtaining beams of particles with a sp

Details Process and apparatus for obtaining beams of particles with a sp Process and apparatus for obtaining beams of particles with a sp

1983-12-07

1985-08-20

Anderson, Bruce C.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

250423P, 250251, 2504923, H01J 37302, H01J 37317, H01J 2724, G21K 100

Patent

active

045366578

ABSTRACT:
Process and apparatus for obtaining beams of particles having a spatially modulated density, application to ion implantation and etching.
For example, the invention consists of passing the particles of one beam into a long life excited state, selectively ionizing the excited particles with the aid of light having an adequate energy and spatially modulated intensity directed onto the excited particles, and separating the ionized particles from the particles which have remained excited, so as to obtain a beam of excited particles and a beam of ionized particles having a spatially modulated density.

REFERENCES:
patent: 3551213 (1970-12-01), Boyle et al.
patent: 3914655 (1975-10-01), Dreyfus et al.
patent: 4074139 (1978-02-01), Pankove
Vriens et al., "Excitation to the Metastable States . . . ", Physica 40 (1968), pp. 229, 232, 233.

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