Fishing – trapping – and vermin destroying
Patent
1994-09-20
1996-11-12
Nguyen, Nam
Fishing, trapping, and vermin destroying
437250, 1566431, 118620, 118723R, 118728, 361234, 269 8, 427289, H01L 2100, H05F 300, B25B 1100
Patent
active
055739814
ABSTRACT:
A method depositing a layer onto a wafer is disclosed. The method has the steps of: affixing the wafer to a wafer support within a deposition chamber by using a single-pole electrostatic chuck; depositing a layer onto a surface of the wafer by plasma by CVD; exhausting a deposition gas used for depositing the layer from the deposition chamber; introducing a residual charge removing gas into the deposition chamber; and forming a residual charge removing plasma by discharging the gas to remove residual charges of the single-pole electrostatic chuck.
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Nguyen Nam
Sony Corporation
Whipple Matthew
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