Method of fabricating semiconductor laser

Fishing – trapping – and vermin destroying

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148DIG95, H01L 2120

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055739768

ABSTRACT:
A method of fabricating a semiconductor laser includes forming an active layer including a compound semiconductor material on a semiconductor substrate, the compound semiconductor material having an energy band gap that monotonically increases as the growth temperature of the material rises above a certain growth temperature, including growing a window structure forming region including at least a region which serves as a waveguide in the proximity of a laser resonator facet at a higher temperature than a region outside the window structure forming region. Therefore, the band gap energy of the window structure forming region is larger than that of the region outside the window structure forming region. Therefore, a semiconductor laser having a window structure can easily be fabricated with a high yield and with great repeatability.

REFERENCES:
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patent: 5087587 (1992-02-01), Morimoto et al.
patent: 5171707 (1992-12-01), Takahashi
patent: 5436192 (1995-07-01), Epler et al.
Arimoto et al, "150 mW Fundamental-Transverse-Mode Operation of 670 nm Window Laser Diode", IEEE Journal of Quantum Electronics, vol. 29, No. 6, Jun. 1993, pp. 1874-1877.

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