Method for reducing contamination of anti-fuse material in an an

Fishing – trapping – and vermin destroying

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437922, 148DIG55, H01L 2170, H01L 2700

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active

055739709

ABSTRACT:
An anti-fuse structure formed in accordance with the present invention includes a conductive layer base. A layer of anti-fuse material overlies the conductive base layer. On top of the anti-fuse layer is an insulating layer, in which a via hole is formed to the anti-fuse layer. The lateral dimension of the via hole is less than about 0.8 microns. Provided in the via hole is a conductive non-Al plug which overlies a layer of a a conductive barrier material such as TiN or TiW that contacts the anti-fuse material and overlies the insulating layer. Tungsten is effectively used as the non-Al plug. An electrically conductive layer is formed over the plug and is separated from the conductive barrier material overlying the anti-fuse layer by the plug. The structure is then programmable by application of a programming voltage and readable by application of a sensing voltage, which is lower than the programming voltage.

REFERENCES:
patent: 5120679 (1992-06-01), Boardman
patent: 5233217 (1993-08-01), Dixit et al.
patent: 5272101 (1993-12-01), Forouhi et al.
patent: 5374832 (1994-12-01), Tung et al.
patent: 5427979 (1995-06-01), Chang

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