Microoptical components and optomechanical microdeflectors with

Details Microoptical components and optomechanical microdeflectors with Microoptical components and optomechanical microdeflectors with

1996-04-24

1998-03-31

Nelms, David C.

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

359813, 359814, 359619, G02B 2608, G02B 2710, G02B 702

Patent

active

057344906

ABSTRACT:
A microoptical component including a microlens having a focal axis and a microbeam to which said microlens, is integrally fixed said microbeam extending along an axis substantially perpendicular to the focal axis of the microlens and undergoing elastic deformations along an axis substantially perpendicular to the focal axis of the microlens and to the axis along which the microbeam extends.

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Patent Abstracts of Japan, vol. 14, No. 092 (P-1009), Feb. 20, 1990, JP-A-01-300433, Dec. 4, 1989.
Optical Engineering, vol. 33, No. 11, pp. 3616-3623, Nov. 1, 1994, M. Edward Motamedi, et al., "Miniaturized Micro-Optical Scanners".
Design, Modeling, and Control of Laser Beam Optics, vol. 1625, pp. 78-83, 1992, Tom D. Milster, et al., "Modeling and Measurement of a Micro-Optic Beam Deflector".
Optical Engineering, vol. 32, No. 11, pp. 2665-2670, Nov. 1993, Edward A. Watson, "Analysis of Beam Steering with Decentered Microlens Arrays".

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