Drying and gas or vapor contact with solids – Apparatus – For diverse operations on treated material
Patent
1999-01-13
2000-01-18
Wilson, Pamela A.
Drying and gas or vapor contact with solids
Apparatus
For diverse operations on treated material
34 58, 414938, 414940, 414217, 414222, 134902, 1341023, F26B 1724
Patent
active
060148179
ABSTRACT:
A processor for processing integrated circuit wafers, semiconductor substrates, data disks and similar units requiring very low contamination levels. The processor has an interface section which receives wafers in standard wafer carriers. The interface section transfers the wafers from carriers onto novel trays for improved processing. The interface unit can hold multiple groups of multiple trays. A conveyor having an automated arm assembly moves wafers supported on a tray. The conveyor moves the trays from the interface along a track to several processing stations. The processing stations are accessed from an enclosed area adjoining the interface section.
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Berner Robert W.
Culliton Stephen P.
Curtis Gary L.
Thompson Raymon F.
Wright Blaine G.
Semitool Inc.
Wilson Pamela A.
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