Exposure apparatus

Details Exposure apparatus Exposure apparatus

1983-04-28

1985-06-25

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Step and repeat

355 54, 355 72, 355 75, 355125, G03B 2742, G03B 2728

Patent

active

045250600

ABSTRACT:
An exposure apparatus for projecting a certain pattern predrawn on a printed board, an integrated circuit or the like on a sheet of film to print the pattern on the sheet. A mask body on which a certain pattern is drawn is held so that it can rotate relative to a film-like body, and when the mask body and the film-like body are held in a certain positional relation during exposure, no gap is formed between these bodies.

REFERENCES:
patent: 4298273 (1981-11-01), Nishizuka et al.
patent: 4431304 (1984-02-01), Mayer

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