Method for analyzing a separation in a deformable structure

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

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356 355, G01B 902

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active

060881011

ABSTRACT:
A deformable structure is subjected to a plurality of reduced pressures, causing a bulge in the surface of the deformable structure above a separation in the deformable structure. The cross sectional area of the bulge is measured for each reduced pressure in a plane parallel to the surface of the deformable structure. When the cross sectional area of the bulge does not increase with a reduction in the pressure, the cross sectional area of the bulge approximates the area of the separation. The depth of the separation is calculated using the change in cross sectional area of the bulge per change in pressure.

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