Piezoelectric bi-morph mirror actuator

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G02F 129

Patent

active

042807565

ABSTRACT:
A piezoelectric wavefront modulator is disclosed having mirror actuators including a first and second layer of piezoelectric material, both internally polarized in a given direction, together with electrode means for increasing the internal electric field in one layer while decreasing the internal electric field in the other layer. As the layers are clamped to the modulator support elements at opposite edges, the degree of bending of the layers may be carefully controlled to cause pusher elements to actuate a mirror, which mirror is oriented parallel to the major surfaces of the top layer of piezoelectric material.

REFERENCES:
patent: 4016415 (1977-04-01), O'Meara
Adelman, Spherical Mirror with Piezoelectrically Controlled Curvature, Applied Optics, vol. 16, No. 12 (Dec. 1977), pp. 3075-3077.
McElroy et al, Laser Tuners Using Circular Piezoelectric Benders, Applied Optics, vol. 14, No. 6 (Jun. 1975), pp. 1297-1302.

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