1975-06-19
1977-03-29
Werner, Frank E.
Cutlery
180125, 214 1BE, 302 2R, B65Q 5102
Patent
active
040145760
ABSTRACT:
A portable carrier for a semiconductor wafer is detachably connected to an air slide so that the wafer can be propelled from the carrier to the air slide and vice versa by air from the air slide. The carrier has a chamber with an air slide base on which the wafer is supported by air from the air slide when the wafer is to be propelled into or out of the chamber. The carrier has a single wafer port, which is sealed except when the carrier is connected to the air slide, through which the wafer enters or exits when propelled by air from the air slide. When the carrier chamber is sealed, the wafer is retained in position within the chamber by retaining means, which are rendered ineffective when the wafer is to be propelled into or out of the chamber.
REFERENCES:
patent: 3405977 (1968-10-01), Albright
patent: 3419164 (1968-12-01), O'Neill
patent: 3513934 (1970-05-01), Crowley
patent: 3645581 (1972-02-01), Lasch, Jr. et al.
Druschel William O.
Gardineer, Jr. Bayard G.
Manning Stanley A.
Musits Bela
International Business Machines - Corporation
Leach, Jr. Frank C.
Powers Henry
Werner Frank E.
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