Semiconductor laser device and semiconductor laser array device

Coherent light generators – Particular active media – Semiconductor

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257 84, 257 85, 385 49, 385 88, H01S 319

Patent

active

056174390

ABSTRACT:
A semiconductor laser device includes a semiconductor laser having a pair of facets and disposed on a semiconductor substrate and a photodiode having a light responsive surface on which a laser beam emitted from one of the facets of the semiconductor laser is incident, also disposed on the semiconductor substrate. The pair of facets of the semiconductor laser and the light responsive surface of the photodiode are both perpendicular to the surface of the semiconductor substrate, and the light responsive surface of the photodiode is disposed so that light of the laser beam reflected by the light responsive surface does not return to the emitting point of the laser beam. Therefore, return light noise generated in the semiconductor laser is avoided. In addition, the pair of facets of the semiconductor laser and the light responsive surface of the photodiode can be formed simultaneously by dry etching, thereby shortening the fabricating process.

REFERENCES:
patent: 4470143 (1984-09-01), Kitamura et al.
patent: 5032879 (1991-07-01), Buchmann et al.
patent: 5175781 (1992-12-01), Hockaday et al.
patent: 5258991 (1993-11-01), Peterson
patent: 5355386 (1994-10-01), Rothman et al.

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