Method for measuring lifetime of semiconductor material and appa

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor

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324158R, 324642, G01R 3126, G01R 2706

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active

050814141

ABSTRACT:
A method and apparatus measure the lifetime of a semiconductor material by directing microwave energy into the semiconductor material and by producing carriers within the semiconductor material by impinging light thereon. A non-metal material is interposed between the semiconductor material and a metallic surface, such that a portion of the microwave energy travels through the semiconductor material and the non-metal material and reflects off of the metallic surface and back through the non-metal material and the semiconductor material. Additionally, a heating member is provided for heating the semiconductor material, whereby the lifetime of the semiconductor material is determined according to characteristics of the reflected microwave energy and the temperature of the semiconductor material.

REFERENCES:
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patent: 3939415 (1976-02-01), Terasawa
patent: 4087745 (1978-05-01), Kennedy, Jr. et al.
patent: 4704576 (1987-11-01), Tributsch et al.
patent: 4739258 (1988-04-01), Schwarz
patent: 4949034 (1990-08-01), Imura et al.

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