Method of operating a scanning probe microscope to improve drift

Details Method of operating a scanning probe microscope to improve drift Method of operating a scanning probe microscope to improve drift

1990-08-13

1992-01-14

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310317, 318116, H01L 4108

Patent

active

050813900

ABSTRACT:
The invention is a method for operating a Scanning Probe Microscope (SPM) to provide the capability to eliminate the scanner drift that occurs after the scan area is offset within the range of the scanner. The method disclosed comprises applying an offset that is larger than the desired one and then reducing the offset back to the desired value for scanning. The technique has been found to produce good results for both large and small scans.

REFERENCES:
patent: 3957162 (1976-05-01), Soderquist
patent: 4925139 (1990-05-01), McCord
patent: 4939401 (1990-07-01), Farral
patent: 5038322 (1991-08-01), Van Loenen

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