Surface acoustic wave resonator

Details Surface acoustic wave resonator Surface acoustic wave resonator

1978-09-05

1980-09-16

Nussbaum, Marvin L.

Wave transmission lines and networks

Coupling networks

Electromechanical filter

310313A, 333196, H03H 920, H03H 932, H01L 4110, H01L 4118

Patent

active

042232864

ABSTRACT:
A surface acoustic wave resonator includes a base plate made of glass and a layer of piezoelectric material which has a plurality of strips extending parallel to each other for forming a reflector. A surface acoustic wave excited from a transducer reflects at each of the strips. The reflectance of such surface acoustic wave is improved by the arrangement of the strips and the thickness of the layer. On the other hand, the temperature coefficient of the resonance frequency is also improved by the arrangement of the strips and the thickness of the layer, and by the amount of the alkali metal oxide contained in the base plate, and further by the thickness of silicon oxide film laminated on the surface of the base plate.

REFERENCES:
patent: 3598619 (1969-04-01), Mikoda et al.
patent: 3687697 (1972-08-01), Faulstich et al.
patent: 3961293 (1976-06-01), Hartmann et al.
patent: 3970970 (1976-07-01), Worley
patent: 4037176 (1977-07-01), Ono et al.
patent: 4144507 (1979-03-01), Shreve
Evans et al., "Sputtered ZnO Surface Wave Transducers," in Electronics Letters, vol. 7, No. 18, Sep. 9, 1971; pp. 957-958.
Bell, Jr. et al., "Surface Acoustic Wave Resonators," in Proceedings of the IEEE, vol. 64, No. 5, May 1976; pp. 711-715.

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