Method of manufacturing an insulated gate field effect transisto

Fishing – trapping – and vermin destroying

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437 69, 437 70, 437 72, H01L 21336

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active

050810588

ABSTRACT:
An insulated gate field effect transistor surrounded by a field silicon oxide layer which is at least partially embedded in a silicon substrate, is disclosed. A pair of silicon oxide layers thinner than the field silicon oxide layer and thicker than the gate insulating film are formed on both end portions of the channel region in the channel width direction, and the gate electrode is formed on the gate insulating film and extends on the pair of silicon oxide layers and on the field silicon oxide layer.

REFERENCES:
patent: 4216573 (1980-08-01), Joshe et al.
patent: 4326329 (1982-04-01), McElroy
patent: 4551910 (1985-11-01), Patterson
patent: 4758530 (1988-07-01), Schubert

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