Thin layer forming method wherein hydrophobic molecular layers p

Details Thin layer forming method wherein hydrophobic molecular layers p Thin layer forming method wherein hydrophobic molecular layers p

1993-07-27

1996-11-19

Breneman, R. Bruce

Fishing, trapping, and vermin destroying

437240, H01L 21316

Patent

active

055762476

ABSTRACT:
A BPSG layer serving as a silicon oxide layer is formed on a semiconductor substrate 1. Formed on the surface of the BPSG layer is a hydrophobic molecular layer comprising hydrophobic groups such as methyl, ethyl and the like, by a silylation reaction (in which silyl having hydrophobic groups such as methyl groups, ethyl groups and the like, is reacted with OH groups, and in which the hydrophobic groups are substituted with H of the OH groups to generate --O--Si(CH.sub.3).sub.3 or the like). The molecular layer prevents the BPSG layer from absorbing moisture.

REFERENCES:
patent: 4885262 (1989-12-01), Ting et al.
patent: 4940673 (1990-07-01), Ponjee et al.
patent: 5094983 (1992-03-01), Furthaler et al.
patent: 5132774 (1992-07-01), Matsuura et al.
patent: 5286681 (1994-02-01), Maeda et al.
patent: 5405805 (1995-04-01), Homma
K. Ahmed et al., "Borophosphosilicate Glass Crystal Induction and Suppression", J. Vac. Sci Technol., A10(2), pp. 313-14 (Mar./Apr. 1992).
Wolf, Stanley `Silicon Processing for the VLSI Era`, vol. 2, pp. 235-136 (1990).
Yano, Kousaku `Improved Interconnect Yield Through Surface Control Silylation (SCS) Method`, 1993 Symposium on VLSI Tech.
Yano, Kousaku `Suppression of Prec. in BPSG Films by Surface Control by Silylation (SCS) Process Aug. 1992 Intern. Conf. on Solid State Devices.
Wolf, Stanley, `Si Proc. for VLSI Era`, VLS2 Lattice Press (1990) pp. 188-196.

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