Method of producing solution-derived metal oxide thin films

Details Method of producing solution-derived metal oxide thin films Method of producing solution-derived metal oxide thin films

1999-05-28

2000-07-11

Beck, Shrive

Coating processes

With post-treatment of coating or coating material

Heating or drying

4271265, 427240, 4273764, 427379, 427380, 4274192, 4274301, 427435, 4274432, B05D 302, B05D 118, B05D 312, B05D 138

Patent

active

060869577

ABSTRACT:
A method of preparing metal oxide thin films by a solution method. A .beta.-metal .beta.-diketonate or carboxylate compound, where the metal is selected from groups 8, 9, 10, 11, and 12 of the Periodic Table, is solubilized in a strong Lewis base to form a homogeneous solution. This precursor solution forms within minutes and can be deposited on a substrate in a single layer or a multiple layers to form a metal oxide thin film. The substrate with the deposited thin film is heated to change the film from an amorphous phase to a ceramic metal oxide and cooled.

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patent: 5858451 (1999-01-01), Boyle
patent: 5928983 (1999-07-01), Culross

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