Method for aligning laser beam with fuses in integrated circuit

Details Method for aligning laser beam with fuses in integrated circuit Method for aligning laser beam with fuses in integrated circuit

1981-04-21

1983-05-10

Reynolds, B. A.

Electric heating

Metal heating

By arc

219121LX, 219121LZ, B23K 2600, B23K 2602, B23K 2604

Patent

active

043831656

ABSTRACT:
A method is disclosed for aligning a laser beam to an integrated circuit. A pair of generally parallel spaced-apart fusible links are formed on the circuit. The laser beam is positioned to a site known to be to one side of one link. Then the beam is stepped towards the links until the link is blown. The beam is then moved a predetermined distance so that it is positioned to one side of the other link. This beam is then stepped toward this link in the opposite direction until it is blown. The midpoint between the links can then be readily computed.

REFERENCES:
patent: 3758745 (1973-09-01), Wilker et al.
patent: 4228528 (1980-10-01), Cenker et al.

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