Micromachined piezoelectric transducer

Details Micromachined piezoelectric transducer Micromachined piezoelectric transducer

1998-05-26

2000-02-22

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310311, H01L 4108

Patent

active

060283890

ABSTRACT:
A micromachined piezoelectric acoustic transducer includes a substrate; at least one piezoelectric actuator means attached at at least one proximal edge to the substrate; a gap around at least a portion of the remaining edges of the piezoelectric actuator means; and a flexible corrugated membrane in at least a portion of the gap and interconnecting the actuator means with at least one of the substrate or a neighboring actuator means.

REFERENCES:
patent: 5162691 (1992-11-01), Mariani et al.
patent: 5767612 (1998-06-01), Takeuchi et al.
patent: 5801476 (1998-09-01), Sturzebecher et al.

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