Terpolymers containing organosilicon side chains

Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Polymers from only ethylenic monomers or processes of...

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526270, 526279, C08F 2400

Patent

active

060281545

ABSTRACT:
A terpolymer containing 20 to 70 mole percent of an acid labile repeating unit, 3 to 40 mole percent of an acrylonitrile based repeating unit and a repeating unit containing silicon side chains. The silicon side chain repeating unit is provided in sufficient amounts so that the terpolymer silicon content is 7 to 20 weight percent. The terpolymer is used primarily in the formulation of multilayer positive operating photoresists.

REFERENCES:
patent: 4481049 (1984-11-01), Reichmanis et al.
patent: 5102771 (1992-04-01), Vogel et al.
patent: 5369200 (1994-11-01), Schaedeli et al.
patent: 5552260 (1996-09-01), Vogel et al.
patent: 5886119 (1999-03-01), Schaedeli et al.

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