Single crystal quartz thin film and preparation thereof

Compositions: ceramic – Ceramic compositions – Devitrified glass-ceramics

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Details

501 12, 427387, 427503, 427515, 117 4, 117 90, 117 91, 117943, 423335, C03C 1012, B05D 302

Patent

active

060280204

ABSTRACT:
A single crystal quartz thin film having a thickness of 5 nm to 50 .mu.m can be prepared by forming the thin film on a single crystal substrate by a sol-gel process and peeling the thin film from the substrate. The present invention can provide the single crystal quartz thin film at a low price without a large and complex apparatus.

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