Method of manufacturing a heterojunction bipolar transistor

Fishing – trapping – and vermin destroying

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357 34, 357 16, 437133, 437228, 148DIG11, H01L 21265, H01R 2120

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047511958

ABSTRACT:
A method of manufacturing a heterojunction bipolar transistor in which a collector region, a base region and an emitter region are successively formed on a compound semiconductor substrate, forming the emitter region by epitaxial growth in a concave portion formed on an electrode leading region at the base region.

REFERENCES:
Nagata et al., "A New Self-Aligned Structure AlGaAs/GaAs HBT for High Speed Digital Circuits", Gallium Arsenide and Related Compounds 1985, Proceedings of the Twelfth International Symposium, pp. 589-594, 1986.
Nagata et al., "A New Self-Aligned AlGaAs/GaAs HBT for High Speed Digital Circuits," Electrical & Electronics Abstracts, Sep. 1986, p. 3579.

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