Superconductor technology: apparatus – material – process – Processes of producing or treating high temperature... – Producing josephson junction – per se
Patent
1998-07-21
1999-12-21
King, Roy V.
Superconductor technology: apparatus, material, process
Processes of producing or treating high temperature...
Producing josephson junction, per se
505474, 505190, 505702, H01L 3924
Patent
active
060049073
ABSTRACT:
The present invention forms a superconducting junction using a cubic YBa.sub.2 Cu.sub.3 Ox thin film as a barrier layer. The present invention forms a first YBCO superconducting thin film, a SrTiO.sub.3 insulating layer thin film on the substrate, etches a side of them in the form of inclination, subsequently integrates a non-superconducting cubic YBCO barrier thin film, a second YBCO superconducting thin film, a SrTiO.sub.3 protecting layer thin film in series on the whole surface of the substrate, etches an opposite side of the etched part of the SrTiO.sub.3 insulating layer thin film in the form of inclination, fabricates a superconducting junction by forming a metal electrode to said aperture after forming apertures which expose said first YBCO superconducting thin film, the second YBCO superconducting thin film, fabricates a superconducting junction upon forming the metallic electrode to the apertures, and deposits a cubic YBa.sub.2 Cu.sub.3 Ox barrier thin film at a temperature of 600-650.degree. C. and a depositing velocity of 6.5-12.2 nm/s.
REFERENCES:
patent: 5292718 (1994-03-01), Tanaka et al.
patent: 5627139 (1997-05-01), Chin et al.
patent: 5721196 (1998-02-01), Nakamura et al.
patent: 5750474 (1998-05-01), Sung et al.
patent: 5892243 (1999-04-01), Chan
B.D. Hunt et al., "All high T.sub.c edge-geometry weak links utilizing Y-Ba-Cu-O barrier layers", Appl. Phys. Lett. 59(8), Aug. 19, 1991, pp. 982-984.
D. Reagor et al., "Development of high temperature superconducting Josephson junctions and quantum interference devices using low deposition temperature Yba.sub.2 Cu.sub.3 O.sub.7-x barriers", Appl. Phys. Lett 66(17), Apr. 24, 1995, pp. 2280-2282.
Suh Jeong Dae
Sung Gun Yong
Electronics and Telecommunications Research Institute
King Roy V.
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