Scanning microscope with means for detecting a first and second

Details Scanning microscope with means for detecting a first and second Scanning microscope with means for detecting a first and second

1991-11-20

1992-12-01

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250225, 359371, H01J 314

Patent

active

051681579

ABSTRACT:
A scanning microscope comprises a sample supporting member for supporting a sample, and a light source for producing a light beam including a light component, which has been polarized linearly in a first direction, and a light component, which has been polarized linearly in a second direction that intersects perpendicularly to the first direction. A first polarizer transmits only the light component, which has been polarized linearly in the first direction. A second polarizer transmits only the light component, which has been polarized linearly in the second direction. A light projecting device forms a small spot of the light beam composed of the light components, which have respectively passed through the first and second polarizers. The sample is scanned with the light spot. A beam trap having a light blocking part, which has a shape corresponding to the shape of the first polarizer, blocks only the direct light component, which has been polarized linearly in the first direction and has passed through the sample. A polarization beam splitter separates the two light components from each otehr which are included in part of the light beam having passed through the sample and then through the beam trap. First and second light receiving devices respectively forms point images of the two separated light components.

REFERENCES:
patent: 4734578 (1988-03-01), Horikawa
patent: 4927254 (1990-05-01), Kino et al.
patent: 5081349 (1992-01-01), Iwaski

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