Apparatus and method for photolithography with phase conjugate o

Details Apparatus and method for photolithography with phase conjugate o Apparatus and method for photolithography with phase conjugate o

1984-05-01

1985-01-29

Punter, William H.

350 362, 350393, G02F 135

Patent

active

044962223

ABSTRACT:
An apparatus and method of photolithography with phase conjugate optics having a pump nonlinear medium for producing four way mixing of a beam of coherent electromagnetic radiation incident to said nonlinear medium with a spatically modulated representation of image thereon. The nonlinear medium producing by the phenomenon of four way mixing. A phase conjugated beam having a representation of the image spatically amplitude modulated thereon. The phase conjugated beam is directed toward a surface sensitive to electromagnetic radiation.

REFERENCES:
patent: 3572925 (1971-03-01), Ables et al.
patent: 3584221 (1971-06-01), Motoaki
Moses et al., "Amplification & Phase Conjugation by Degenerate Four-Wave Mixing in a Saturable Absorber", Optics Lett., 2-1980, pp. 64-66.
White et al., "Real-Time Processing Via Four-Wave Mixing in a Photorefractive Medium", App. Phys. Lett., 7-1980, pp. 5-7.
Levenson, M. D., "High Resolution Imaging by Wave-Front Conjugation", Optics Lett., 5-1980, p. 182.
Hellwarth, R. W., "Generation of Time-Reversed Wave Fronts by Nonlinear Refraction", Jr. Opt. Soc. Am., 1-1977, pp. 1-3.
Bloom et al., "Conjugate Wave-Front Generation & Image Reconstruction by Four-Wave Mixing", App. Phys. Lett., 11-1977, pp. 592-594.
Yariv et al., "Amplified Reflection, Phase Conjugation & Oscillation in Degenerate Four-Wave Mixing", Optics Lett., 7-1977, pp. 16-18.
Yariv, A., "Phase Conjugte Optics & Real-Time Holography", IEEE Jr. of Q.E., 1978, pp. 650-660.
Levenson et al., "Projection Photolithography By Wave-Front Conjugation", Jr. Opt. Soc. Am., 6-1981, pp. 737-743.

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