Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Patent
1992-12-18
1994-08-23
Stinson, Frankie L.
Cleaning and liquid contact with solids
Processes
Including application of electrical radiant or wave energy...
134 254, 134184, 134186, 134155, B08B 310
Patent
active
053398424
ABSTRACT:
Cleaning methods and apparatus for removing particulate materials from the surfaces of objects are disclosed. Megasonic vibrations are utilized to cause a liquid cleaning fluid in a first reservoir to rise above the upper end of the first reservoir, contact the surface of the object to be cleaned and flow over a weir at the upper end of the first reservoir into a second reservoir. The methods and apparatus are useful to remove small particles, e.g. having a particle size of less than about 1 micron, from flat or curved planar surfaces. The methods and apparatus can be integrated with subsequent processing steps, e.g. applying thin film coatings, without intermediate handling of the objects.
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Specialty Coating Systems Inc.
Stinson Frankie L.
Volles W. K.
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