Photoelectric linear image sensor having multilayer insulating l

Details Photoelectric linear image sensor having multilayer insulating l Photoelectric linear image sensor having multilayer insulating l

1988-05-13

1990-06-05

Ng, Jin F.

Facsimile and static presentation processing

Facsimile

Recording apparatus

358482, H04N 314

Patent

active

049318730

ABSTRACT:
An improved linear image sensor of the type having a plurality of linearly arranged photodetecting resistors of amorphous silicon film, leader electrodes individually connected thereto, striped matrix electrodes, and an insulating layer covering the striped matrix electrodes is provided. Each of said leader electrodes are in contact with each of said striped matrix electrodes via a hole formed by patterning in the insulating layer. The insulating layer is made up of a plurality of insulation films laminated one over another by repeating the steps of film forming and patterning. Thus, even though pinholes occur during deposition or patterning of individual layers, there is only a small probability that two or more pinholes will occur at the same place. The risk of short circuits caused by pinholes is therefore substantially reduced.

REFERENCES:
patent: 4482804 (1984-11-01), Oritsuki et al.
patent: 4607168 (1986-08-01), Oritsuki et al.
patent: 4737852 (1988-04-01), Dohkoshi et al.

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