Pressure sensor

Measuring and testing – Fluid pressure gauge – Diaphragm

Patent

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Details

G01L 906, G01L 708

Patent

active

060033819

ABSTRACT:
A pressure sensor including a pressure sensor element, a pedestal having a through-hole defined therein for guiding an external pressure to the pressure sensor element and a header, all of which are successively tightly bonded together. The pressure sensor also includes a cap for covering the pressure sensor element and the pedestal and mounted tightly on the header. A region of the header ranging from a joint between the cap and the header to a joint between the pedestal and the header is stepped.

REFERENCES:
patent: 5448444 (1995-09-01), Provenzano et al.
patent: 5515732 (1996-05-01), Willcox et al.
patent: 5635649 (1997-06-01), Tobita et al.

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