Fishing – trapping – and vermin destroying
Patent
1989-10-13
1990-06-05
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437150, 437 29, 437 41, 148DIG126, 148DIG131, 357 234, H01L 21266
Patent
active
049314084
ABSTRACT:
An oxide sidewall spacer is formed on the sidewalls of a gate prior to forming the body region of a DMOS transistor. An ion implantation or diffusion process is then conducted to form the body region, where the gate and the oxide sidewall spacer together act as a mask for self-alignment of the body region. After a drive-in step to diffuse the impurities, the body region will extend only a relatively short distance under the gate due to its initial spacing from the edge of the gate. After the body region is formed, the oxide sidewall spacer is removed, and impurities to form the source region are implanted or diffused into the body region and driven in. Since the extension of the body region under the gate is limited by the oxide sidewall spacer, the channel region between the edge of the source region and the body region under the gate may be made shorter resulting in the channel on-resistance of the transistor being reduced.
REFERENCES:
patent: 4443931 (1984-04-01), Baliga et al.
patent: 4503598 (1985-03-01), Vora et al.
patent: 4774198 (1988-09-01), Contiero et al.
patent: 4810665 (1989-03-01), Chang et al.
Hearn Brian E.
Quach T. N.
Siliconix incorporated
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